Spatial Temperature Profile in a Magnetised Capacitively Coupled Discharge
نویسندگان
چکیده
منابع مشابه
Modeling Discharge and Surface Processes in Capacitively Coupled Reactors
Plasmas are ideal for producing reactive species (radicals, ions) for modifying surface properties to achieve desired mechanical or chemical functionality. Two of the most technologically (and commercially) important applications of plasmas are etching/deposition for microelectronic fabrication and functionalization of polymers. Among these applications, capacitively coupled plasma (CCP) source...
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ژورنال
عنوان ژورنال: Walailak Journal of Science and Technology (WJST)
سال: 2018
ISSN: 2228-835X,1686-3933
DOI: 10.48048/wjst.2019.4784